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Электронный каталог: Gornev, E. S. - Linear Measurement Metrology in Micro- and Nanotechnology
Gornev, E. S. - Linear Measurement Metrology in Micro- and Nanotechnology
Книга (аналит. описание)
Автор: Gornev, E. S.
Perspective technologies, materials and equipments of solid-state electronic components: Linear Measurement Metrology in Micro- and Nanotechnology
б.г.
ISBN отсутствует
Автор: Gornev, E. S.
Perspective technologies, materials and equipments of solid-state electronic components: Linear Measurement Metrology in Micro- and Nanotechnology
б.г.
ISBN отсутствует
Книга (аналит. описание)
Gornev, E. S.
Linear Measurement Metrology in Micro- and Nanotechnology / E. S. Gornev, V. V. Kalendin, P. A. Todua, Yu. A. Novikov, A. V. Rakov // Perspective technologies, materials and equipments of solid-state electronic components : proc. of II russian-japanese seminar (6 April, 2004. Moscow) / ed. L. V. Kozhitov . – M. : MISA Publ., 2004 . – P. 247-256 .
Gornev, E. S.
Linear Measurement Metrology in Micro- and Nanotechnology / E. S. Gornev, V. V. Kalendin, P. A. Todua, Yu. A. Novikov, A. V. Rakov // Perspective technologies, materials and equipments of solid-state electronic components : proc. of II russian-japanese seminar (6 April, 2004. Moscow) / ed. L. V. Kozhitov . – M. : MISA Publ., 2004 . – P. 247-256 .