Электронный каталог -Borisov, S. S. - Simulation of the fluctuations of energy and charge deposited during e-beam exposure- Absopac

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Электронный каталог: Borisov, S. S. - Simulation of the fluctuations of energy and charge deposited during e-beam exposure

Borisov, S. S. - Simulation of the fluctuations of energy and charge deposited during e-beam exposure

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Автор: Borisov, S. S.
Физика и техника полупроводников: Simulation of the fluctuations of energy and charge deposited during e-beam exposure
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Borisov, S. S.
Simulation of the fluctuations of energy and charge deposited during e-beam exposure / S. S. Borisov, S. I. Zaitsev, E. A. Grachev // Физика и техника полупроводников . – 2007 . – T. 41, N 8 . – С. 899-900 .